Semiconductor
Applications
Innovative Fiber Optic Solutions for Semiconductors
Photonics-based sensors and spectrometers used in the semiconductor industry provide real-time monitoring: semiconductor deposition and etching processes, plasma ashing and cleaning, optical endpoint detection, quality control…
What sets us apart?
Spectrometers and optical sensors are used in Semi Fab Chambers to monitor semiconductor deposition and etching processes.
Remote plasma sources for process chamber cleaning.
Gas sensors provide high sensitivity measurements of the gas species present in a vacuum.
Semiconductor case studies
